Microelectronics Products

Semiconductor/UHP Digest (PDF 628kB)

CAD Drawings Available in 2D & 3D (Contact Us)

Veriflo Division is a leading manufacturer of high-purity regulators, valves & transducers for precision gas and liquid delivery in the fabrication of semiconductor, as well as in the chemical, petrochemical and pharmaceutical industries.

See Instrumentation Connectors for UHP Fittings.

See Partek Division for PFA/PTFE Fittings & Valves.

Diaphragm Valves (PDF 3.0MB)

CAD Drawings Available in 2D & 3D (Contact Us)

Quantum & Titan Valve Selection Guide (PDF 607kB)

SMC917 - Surface Mount 917 1-1/8” Ultra High Purity Diaphragm Valves providing exceptional performance for today's modular surface mount systems.

SM930 - Surface Mount 930 Air Operated and Manual Diaphragm Valve. The SM930diaphragm valve provides exceptional performance for today’s modular surface mount systems.

SM955 - Surface Mount 955 Air Operated and Manual Diaphragm Valve. The SM955 provides exceptional performance for today’s modular surface mount systems that have high flow requirements.

Quantum 930 - 930 valve is used in ultra high purity applications.

Quantum 930Y - a diaphragm valve engineered to meet the specific requirements of semiconductor OEM tool manufacturers. The 930Y is a sophisticated design with Veriflo’s proven ultra high purity, low internal volume components. Space savings and fewer welds make the 930Y ideal for process control and purge systems.

Quantum 945 - The 945 was designed specifically for semiconductor process control and have all of the features and benefits of the 944 Series with reduced internal volume and body size. A unique feature of the 945 is the machined-on tube stubs, which allows for improved dimensional control.

Quantum 945Y - The 945Y is a custom built high-purity diaphragm valve manifold, engineered to meet the specific requirements of semiconductor OEM tool manufacturers. The 945Y is a sophisticated design with Veriflo’s proven ultra high purity, low internal volume components. Space savings and fewer welds make the945Y ideal for process control and purge systems.

Quantum 955 - The Quantum 955 Manually Operated diaphragm valve provides higher flows in an exceptionally clean, compact device.

Quantum 955AOPLP - the Quantum 955 Air-Operated diaphragm valve is ideal for low vapor pressure gasses such as WF6 andBCL3.

Quantum 955Y - The 955Y is a custom built high-purity, high-flow diaphragm valve manifold, engineered to meet the specific requirements of semiconductor OEM tool manufacturer and point-of-use gas delivery systems. The 955Y is a sophisticated design with Veriflo’s proven ultra high purity, low internal volume components. Space savings and fewer welds make the955Y ideal for process control and purge systems.

Titan II AOP Plus - the TITAN II® AOP Plus high pressure diaphragm valve. The TITAN II® AOP is specifically designed for high pressure, high cycle, ultra high purity applications. The TITAN II® AOP Plus medium pressure diaphragm valve is specifically designed for medium pressure, medium cycle, ultra high purity applications. The TITAN II® AOP Plus low pressure diaphragm valve is specifically designed for low pressure, low cycle, ultra high purity applications.

Titan II Manual Plus - the TITAN II® Manual Plus springless diaphragm valve is specifically designed for high pressure, high cycle, and ultra high purity applications.

Titan II MS - the TITAN II® MS manual springless diaphragm valve is specifically designed for high temperature, high pressure, high cycle, and ultra high purity applications.

Quantum 928AOPHP - The 928AOPHP is a poppet-style diaphragm valve for remote control of gases or liquids. The 928AOPHP serves two functions: it acts as the system inlet valve, and it reduces the system pressure to a safer working range.

Lockout Tagout - Parker Hannifin Corporation’s Veriflo Division presents the LockOut-TagOut safety option available for its standard diaphragm valve product line. This design allows for tools or gas lines to be locked out for maintenance activities. This durable metal design can be used with confidence while doing repairs.

Vacuum Generator - the VAC100 vacuum generator has been designed to be used in conjunction with purge systems.

Bellows Valves (PDF 3.0MB)

CAD Drawings Available in 2D & 3D (Contact Us)

P Series Manual Valve - These valves are multi-purpose packless externally pressurized bellows valves that may be used in a wide variety of gas or liquid systems. The P Series manual bellows valve offers clean, reliable operation at full system pressures in either flow direction.

P Series Toggle Valve - These valves provide a quick open and close operation with positive stem retraction in valve sizes 1/4” thru 1/2” tube. These externally pressurized bellows valves will operate in vacuum to 150 psig at 70°F to handle shut-off control for toxic, ultra-pure, pyrophoric and corrosive media in vacuum or pressurized systems.

P Series Pneumatic - The P Series bellows valve offers a 360° rotation of the air inlet port for position purposes and ease of use. The P Series bellows valve provides clean, reliable operation at full system pressures.

P Series High Pressure - These valves are multi-purpose packless externally pressurized bellows valves that may be used in a wide variety of high pressure gas or liquid systems. The P Series HP Pneumatic bellows valve provides clean, reliable operation at full system pressures in either flow direction.

Bulk Gas Valves (PDF 1.9MB)

CAD Drawings Available in 2D & 3D (Contact Us)

CyMax Valve - CyMax manual & pneumatic operated diaphragm valves are a patented, all welded diaphragm valve offering maximum reliability for your critical applications.  The CyMax Single Integrated Component Diaphragm Valves reduces the number of welds and eliminate dead legs in your UHP gas delivery system. The compact designs allow multiple drops from a single vertical or horizontal main, without restriction to flow in the main.

CvMax Valve - CvMax 600 Series Bellows Valves are manufactured specifically for Ultra High Purity Gas Systems. Parker Bellows Valves are designed with the industry's leading straight-through full flow. There are no restricted paths or bends that would reduce flow and generate particulate. These features provide the highest gas flow with minimal pressure drop.

500 Series - the 500 Series Single Integrated Component Bellows Valves reduces the number of welds and eliminate dead legs in your UHP gas delivery system. The compact designs allow multiple drops from a single vertical or horizontal main, without restriction to flow in the main.

Quantum 935/935T/935Y -  The 935 provides superior control of gases and liquids under high flow, low pressure conditions where absolute purity is essential. The 935 is a "positive retraction" diaphragm valve —an engineered feature which has reduced the surface area and entrapment potential inherent in bellows valves.

18 Series - The18 Series provide a high-flow, positive shutoff for high purity gas/fluid systems. This1/2” and 3/8” spring type diaphragm valve offers superior leak integrity for Manually and Pneumatically Actuated applications with pressure ranges from vacuum to 1500psig.

High Purity Regulators (PDF 2.7MB)

CAD Drawings Available in 2D & 3D (Contact Us)

SMSQ2Micro & SMSQ2Micro130E - The SMSQ2Micro part of the process proven SQ product line, provides excellent stability and sensitivity for today's modular surface mount systems. The SMSQ2Micro provides all the performance benefits to modular designs including: springless tied diaphragm design; extraordinary transient response performance; and low particle counts.

SQ2Micro & SQ2Micro130E- The SQ2Micro is a revolutionary, miniature, high performance, point-of-use regulator with a foot-print designed specifically to reduce semiconductor system real estate. The improved alignment of theSQ2Micro allows for even better performance than it’s predecessor, the SQMicro.

SQ130E - This regulator is a high flow, springless and threadless, point-of-use regulator designed to be used in process gas cabinets for gas companies, equipment manufacturers, and end users. The SQ130E has a Cv four times greater (.2 Cv) than the process proven SQ60, from which the SQ130Ewas developed.

SQ140E - The SQ140E was developed in response to the need for high performance point-of-use regulators for modern semiconductor processing. It was designed from scratch with no preconceptions or ties to older high pressure designs.

SQ420E - The SQ Series was developed in response to the need for high performance point-of-use regulators for modern semiconductor processing. The SQ’s were designed from scratch, with no preconceptions, no ties to older high-purity designs.

SQB - The SQB Series was designed specifically for bulk specialty gas delivery systems. The design incorporates all the benefits of the SQ series regulators while giving the benefit of higher pressures.

SQ60 - the SQ60 which was developed in response to the need for high-performance point-of-use regulators for modern semiconductor manufacturing. It is a springless, threadless, point-of-use regulator designed-for process gas cabinets for gas companies, equipment manufacturers, and end users.

SQ60SA -  This regulator was developed in response to the need for high-performance point-of-use pressure regulator in the sub-atmospheric range. The SQ60SAwas designed as a special modification of the popular SQ60, which revolutionized low flow point-of-use regulation.

SQHP - This high purity regulator is a continuation of Veriflo’s process-proven SQ line of regulators. A high pressure version of the high-purity SQ60 point-of-use regulator, the SQHP was designed for state-of-the-art semiconductor applications.

959TDR & NPR959 - The 959 is a high purity, high pressure tied diaphragm regulator. The 959 regulator controls pressure flows accurately and predictably without changing the liquids or gases and without adding particles or ions to the flowing material. Sub atmospheric pressure control available with the NPR959.

735TDR &NPR735 - The two stage, tied-diaphragm regulator is designed to provide constant outlet pressure regardless of inlet pressure fluctuations. Sub atmospheric pressure control available with the NPR735.

QR4000 - The QR4000 is a high purity, high pressure non-tied diaphragm regulator. The QR4000 Series utilizes a metal-to-metal diaphragm seal which provides enhanced leak integrity.

NPR4000 - the High Purity NPR4000 regulator for applications involving negative delivery pressures with low pressure gas sources. This regulator is specifically designed to regulate negative pressures down to -26 in Hg vacuum(100 Torr).

HFR900W - The HFR900W is designed and engineered for the control of high purity, corrosive, toxic, flammable, and inert gases, at a high flow rate and low inlet pressure.

SPR860 - The SPR860 is designed for very high flow with medium to low supply pressure and minimal pressure drop. An internal control system monitors both upstream and downstream pressures and servos the regulator in response to fluctuations.

BFR5K - The BFR5K was created in response to the need for a small, high flow, high performance regulator for semiconductor processing. The BFR5K provides a stable outlet pressure over a wide variety of conditions with flow rates as high as 5000 slpm.

SQServo - The SQServo incorporates a pressure-setting knob controlling a precise pressure sensor, a pneumatic servo-valve, and a high flow, “domeloaded” large SQ pressure regulator, con-trolled by the servo-valve.

Facility Regulators (PDF 1.6MB)

CAD Drawings Available in 2D & 3D (Contact Us)

IR4000, IR4200, IR4000W - This series is an internally threadless pressure regulator for instrument/analyzer and semiconductor applications. The internal threadless design minimizes purge times, and reduces carrier and calibration gas usage. Instrument applications include gas management systems in petrochemical/refineries and process analyzer systems. Semiconductor applications include general purpose gas management (Air, Clean Dry Air (CDA), and Plant Nitrogen).

IR5000, IR5200, IR5000W - This series is a high pressure regulator. Veriflo Division continues the internally threadless design of the IR4000 family of products. IR5000 pressure reducing regulator is designed with a larger convoluted diaphragm than the IR4000. This allows for greater sensitivity, and provides precise outlet pressure control. Instrument applications include gas management for analyzer systems and other industrial processes. Semiconductor applications include general purpose gas management (Air, Clean Dry Air (CDA), and Plant Nitrogen) Systems.

IR6000, IR6200, IR6000W - This series is an internally threadless pressure regulator for pressure reducing industrial/analytical applications including cylinder and calibration gases. Instrument applications include gas management in refineries, process analyzer systems, and cylinder gas pressure reduction.

NPR4000 - the High Purity NPR4000 regulator for applications involving negative delivery pressures with low pressure gas sources. This regulator is specifically designed to regulate negative pressures down to -26 in Hg vacuum(100 Torr).

HFR900W - The HFR900W is designed and engineered for the control of high purity, corrosive, toxic, flammable, and inert gases, at a high flow rate and low inlet pressure.

BFR5K - The BFR5K was created in response to the need for a small, high flow, high performance regulator for semiconductor processing. The BFR5K provides a stable outlet pressure over a wide variety of conditions with flow rates as high as 5000 slpm.

Check Valves (PDF 107kB)

CAD Drawings Available in 2D & 3D (Contact Us)

316FW - The 36FW Check Valve is a high purity check valve that minimizes noise and conserves much needed panel space.

Cylinder Connections (PDF 720kB)

CAD Drawings Available in 2D & 3D (Contact Us)

Parker Hannifin Corporation’s Veriflo Division presents CGA Connections. CGAs are used to connect High Purity-Specialty gases in process applications.

DISS Cylinder Connections (PDF 164kB)

CAD Drawings Available in 2D & 3D (Contact Us)

CGA DISS - CGA’s are used to connect Semiconductor/High Purity-Specialty gases in process applications.

More Veriflo Products

UHP UltraSeal Catalog (PDF 9.5MB)

Instrument Tubing Selection Guide (PDF 518kB)

CAD Drawings Available in 2D & 3D (Contact Us)

Parker UHP products are designed as leak-free connections where ultra-high pure conditions are required. UltraSeal™ products, with their o-ring face seal design and optional metal o-ring, provide a leak-free seal from vacuum to positive pressure.

UHP VacuSeal Catalog (PDF 852kB)

Instrument Tubing Selection Guide (PDF 518kB)

CAD Drawings Available in 2D & 3D (Contact Us)

Parker UHP products are designed as leak-free components for critical applications where ultra-high pure conditions are required. VacuSeal™ products, with their mating gasket and toroid design, provide a metal-to-metal seal with leak-free service from vacuum to positive pressure.

UHP Mini-Buttweld Catalog (PDF 2.3MB)

Instrument Tubing Selection Guide (PDF 518kB)

CAD Drawings Available in 2D & 3D (Contact Us)

Parker UHP products are designed as leak-free components for applications where ultra-high pure applications are required. MiniButtweld™ Fittings provide compact ultra-high pure designs for use with orbital weld equipment. Their unique machining and surface enhancement prevent outgassing and inhibit corrosion.

Medium Pressure Products Catalog (PDF 5.3MB)

CAD Drawings Available in 2D & 3D (Contact Us)

Parker MPI™ Fittings have been engineered and manufactured to provide secure, tight, and leak resistant connections throughout industry, including off-shore oil and gas exploration platforms, research labs, and other facilities that require operating pressures in the range of 6,000 to 15,000psi.