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The Instrumentation Group
provides highly engineered flow control components and systems. These
components range from basic compression tube fittings, pipe fittings,
needle valves, ball valves, compact stream switching valves to modular
fitting and valve packages. These items are all developed and
manufactured to increase our customer's up-time, maintain safety,
improve production and quality control. Parker is equally committed with
assisting our customers in decreasing their downtime, labor and
maintenance costs. Our Instrumentation products are designed and
developed with our customer's application requirements in mind. Parker
is working closely with our customers in new opportunities and the
various associated solutions to those instrumentation application issues.
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Instrumentation
Process Analyzer (IPA) |
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The
Veriflo Division of Parker Hannifin Corporation is a leading
manufacturer of precision diaphragm and bulk gas valves, regulators,
and flow control components for the control and application of
liquids and gases. The Division offers two unique product offerings,
Ultra High Purity (UHP) for semiconductor and solar cell
fabrication. The second offering is a complete Instrumentation
Process Analyzer (IPA) line for petrochemical, refining and general
industry applications.
Process Analyzer Condensed Catalog (10.8MB)
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Instrumentation
Process Analyzer - Regulators |
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The IR4000
Series Single Stage Regulator offers high pressure capability
with an inlet pressure up to 4,000 psig. The large convoluted
Hastelloy C-22® diaphragm provides stable pressure control over the
operational range of the regulator.
IR4000 Regulator
(1.8MB)
IR4000W Regulator
(2.0MB)
IR4200 Regulator
(1.5MB)
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The IR6000
Series 2-Stage Regulator offers high pressure capability with an
inlet pressure up to 4,000 psig. The large convoluted Hastelloy
C-22® diaphragm provides stable pressure control over the
operational range of the regulator.
IR6000 Regulator
(1.7MB)
IR6000W Regulator
(1.7MB)
IR6200 Regulator
(1.8MB)
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The IR5000
Series Single Stage Regulator offers high pressure capability
with an inlet pressure up to 3,500 psig. The larger convoluted
Hastelloy C-22® diaphragm provides greater sensitivity over the
operational range making this regulator ideal for precise outlet
pressure control.
IR5000 Regulator
(1.9MB)
IR5000W Regulator
(910kB)
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The HFR900
Series Single Stage Regulator is designed and engineered for use
in those applications using high flow rates requiring a compact
pressure regulator for control. The HFR900 Series regulator
can be used with corrosive and non-corrosive gases and meets most
high flow requirements with less than 500 psig supply pressure.
HFR900 Regulator
(1.8MB)
HFR900W Regulator
(513kB)
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The HF1200
& HFT1200 Series Single Stage Regulators offer high flow capability with
an inlet pressure up to 1,250 psig. The large convoluted Hastelloy
C22® diaphragm provides stable pressure control over the operational
range of the regulator.
HF1200 Regulator
(261kB)
HFT1200 Regulator
(261kB)
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The APR66
Series Single Stage Regulator is a high pressure reducing
single-stage regulator designed to operate at inlet pressures up to
6000 psig. The APR66 offers a full range of pressure sensing without
time consuming spring and piston change outs.
APR66 Regulator (1.2MB)
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The 735
Series Regulator offers a two stage, tied diaphragm design to
provide a constant outlet pressure regardless of inlet pressure
fluctuations. The 735 Series tied diaphragm regulator provides shut
off of corrosive or hazardous gases if a leak across the seat
occurs. For subatmospheric pressure control, a negative pressure 735
regulator (NPR735) is available.
735 Regulator (635kMB)
735W/NPR735 (646kMB) |
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The HPR800
Series High Pressure Regulator is designed to meet those
applications requiring high outlet pressures up to 2500 psig. As a
diaphragm actuated regulator, the HPR800 has fewer seals exposed to
the media than a piston actuated regulator.
HPR800 Regulator
(1.3MB)
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The MIR700
Series Regulator
offers a compact single stage regulator designed for low to medium
pressure applications. Constructed from brass or stainless steel,
this unit is capable of handling a broad range of media.
MIR700 Regulator (1.7MB) |
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The 959
Series Regulator is a high pressure, tied diaphragm regulator.
The 959 Series tied diaphragm regulator provides shut off of
corrosive or hazardous gases if a leak across the seat occurs.
Subatmospheric pressure control is available with the NPR959, a
negative pressure 959 regulator.
959 Regulator (1.1MB)
959W/NPR959(455kB)
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The NPR4100
Series Negative Pressure Regulator offers negative delivery
pressures with the use of low pressure gas sources. This regulator
is specifically designed to regulate negative pressures down to -26
in. Hg vacuum (100 Torr).
NPR4100 Regulator (1.7MB) |
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The XPR
Series High Pressure Regulator safely reduces pressures from
10,000 psig (6,000 psig on the brass unit) inlet, down to as low as
50 psig by utilizing seven (7) different ranges. The self-relieving
feature comes standard, with a non-self relieving option available.
XPR Regulator (890kB)
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The ABP1
Series Back Pressure Regulator is a versatile design for the
control of inlet, upstream or back pressure in an instrument or
analyzer system. The materials of construction of this regulator
make it suitable for applications where corrosive media and/or
environments are present.
ABP1 Regulator (1.4MB) |
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The ABP3
Series Back Pressure Regulator is a versatile design for the
control of inlet, upstream or back pressure in an instrument or
analyzer system. The large convoluted diaphragm provides the user
greater sensitivity of outlet pressures
ABP3 Regulator (1.8MB) |
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The BPR50
Series Back Pressure Regulator is a piston style back pressure
regulator designed to control upstream or back pressure with
corrosive media and environments.
BPR50 Regulator (1.3MB) |
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The AVR3 &
AVR4 Series Vaporizing Regulators are designed to heat and/or
vaporize a gas or liquid sample before entering an analyzer system.
The unique design allows the user to disassemble the regulator and
heat transfer components for complete cleaning and repair of the
unit, thus reducing expensive replacement costs and down time.
AVR3 Vaporizing
Regulator (1.8MB)
AVR4 Vaporizing
Regulator (678kB) |
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Instrumentation
Process Analyzer - Valves |
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The NOVA Diaphragm Valve is an
economical, general purpose diaphragm valve. Available in 316L
Stainless Steel or Brass. Standard construction includes an Elgiloy®
diaphragm and an outboard metal-to-metal seal.
Packless Valves (752kB) |
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The NOVAAOP
Series Diaphragm Valve is a derivative of the NOVA manually
operated valve and Veriflo’s time-proven air actuated valves. The
AOP is available in normally open (NO) or normally closed (NC)
configurations. A choice of two line pressures are available, 250
psig and 500 psig.
Packless Valves (752kB) |
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The 16 Series
Valves provide a high-flow, positive shut-off for fluid systems.
This 1/2" spring type diaphragm valve offers superior leak integrity
for manually and pneumatically actuated applications with pressure
ranges from vacuum to 3,000 psig.
16 Series Valve (762kB) |
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The NV17
Series Valves are an economical, high performance and high cycle
life diaphragm valve. Typical uses include shut-off valve, isolation
valve, in gas control panels, ChangeOver Systems and analyzer
sampling systems.
NV17 Series Valve
(1.8MB) |
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The NV55 Series Valve is an
economical, general purpose, high flow diaphragm valve ideally
suited for use when flowing large volumes of corrosive and
non-corrosive fluids.
NV55 Series Valve (1.6MB) |
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The FS190 Series is
a non-attitude sensitive, excess flow shut-off valve designed to
operate with a wide range of inlet pressures.
FS190 Excess Flow (2.0MB) |
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The VR7
Series is an economical relief valve designed to vent excess
pressure from a regulator should a minor seat leak occur. This valve
is recommended for use with regulators to protect the regulator and
outlet pressure gauge and is not intended for applications where
repeated or frequent venting is required.
VR7 Pressure Relief (1.1MB) |
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The F9 Series Check Valve,
a high purity, all welded check valve, featuring a patented
asymmetric spring design for a consistently quiet operation. The F9
Series Check Valve offers high Cv (up to Cv = 0.90) in a small
footprint to conserve much needed panel space.
F9 Check Valve (2.0MB) |
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Instrumentation
Process Analyzer - Flow Controls |
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The LC223S
Flow Controller is a high pressure gas or liquid flow
controller for liquid chromatography, chemical injection and
sampling. The LC223S provides constant flow with varying downstream
pressure.
LC223S Flow Controller
(1.4MB) |
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The SC423XL
Flow Controller is a unique device which supplies a constant
flow with a self correcting action to compensate for changes in
downstream pressure. The SC423XL was designed for air and analyzer
sampling systems which require very low flow rates.
SC423XL Flow
Controller (1.5MB) |
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Analytical Systems |
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The
ChangeOver System (COSE) is a compact turnkey module that
assists the operator with their total gas management. The COSE
maintains a continuous gas delivery from two separate sources
allowing for maximum cylinder gas usage from one source before
automatically switching to the second source. The COSE lowers
specialty gas costs by maximizing the consumption of gas from each
cylinder. In addition, the gas cylinder bank(s) can be monitored
remotely utilizing the optional pressure switches reducing the need
for visual inspection by the operator.
COSE ChangeOver System (786kB) |
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The Mini
ChangeOver System (COSM) is a compact turnkey module that
assists the operator with their total gas management. The COSM
maintains a continuous gas delivery from two separate sources
allowing for maximum cylinder gas usage from one source before
automatically switching to the second source. The COSM lowers
specialty gas costs by maximizing the consumption of gas from each
cylinder.
Mini ChangeOver System (835kB) |
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R-max™
Stream Switching System
The Parker R-max is a multi-functional
system capable of integrating both stream switching and filtering
into one unique compact assembly. The system is designed to control
both gases and liquids in analytical systems ranging from vacuum to
500 psig (34 bar) while requiring only 40 psig (3 bar) actuating air
pressure. The system was engineered with a focus on improved product
reliability and reduced cost of ownership. The Parker R-max Stream
Switching System utilizes state-of-the-art surface mount technology
to reduce leak paths, internal volume, and dead volume. With surface
mounting, system components may be easily removed and replaced
without breaking process connections. In addition, the Parker R-max
system utilizes an internal self-purging outlet header to eliminate
the need for an additional outlet loop.
R-max Stream Switching (1.2MB) |
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IntraFlow™ Modular System
Parker’s IntraFlow™ substrate fittings have been developed specifically for
analytical, lab and other complex general purpose instrumentation flow
control systems. ISA/ANSI SP76.00.02 compliant, Parker IntraFlow™ fittings
provide maximum flexibility with minimal space requirements. All flow paths,
regardless of direction, are maintained on a single plane within the
system as there are no lower level manifold blocks required. Contiguous
fitting flow paths are intra-connected with slip fit pressure connectors,
while a threaded pegboard provides connection force and rigidity when
fittings are mounted with cap screws.
IntraFlow System (536kB)
IntraFlow Enhanced Functionalities (599kB)
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Pilot Pro™
Communication Interface for Sample Conditioning
Pilot Pro™ is a sample conditioning
system communications interface designed to link plant process
control operations and analyzer maintenance networks. A sensor and
solenoid administration module, Pilot Pro™ is designed to acquire,
transmit and manage real-time sample system information. Its
flexible communications capability allows analyzer engineers to
receive critical sample system data (pressure, temperature, and
flow) to promote proactive maintenance activities and reduce
downtimes.
Pilot Pro (2.3MB) |
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Vent Master Header
Pressure Control System
Parker Instrumentation
provides a solution for venting samples from process analyzers into
a plant's flare disposal or return system. Designated Vent Master,
the product creates a constant pressure environment in the vent
header to keep chemical/petrochemical process analyzers operating at
their maximum accuracy. The system eliminates the need to vent to
atmosphere, and resolves analyzer accuracy issues associated with
alternative disposal techniques
Vent Master (1.8MB) |
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Vent Recovery System
The
Parker Analyzer Pressure Regulation and Vent Recovery System
automatically and continuously adjusts for variations in gas supply
pressures and flows. This system has been engineered to meet the
requirement of continuous analyzers designed to operate at constant
pressure in order to provide accurate analyses of gases. The combination
of pressure and flow regulation provides the required stability even
with greatly varying inlet and outlet pressures.
Vent Recovery System (750kB) |
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Ultra High Purity (UHP) |
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The
Veriflo Division of Parker Hannifin Corporation is a leading
manufacturer of precision diaphragm and bulk gas valves, regulators,
and flow control components for the control and application of
liquids and gases. The Division offers two unique product offerings,
Ultra High Purity (UHP) for semiconductor and solar cell
fabrication. The second offering is a complete Instrumentation
Process Analyzer (IPA) line for petrochemical, refining and general
industry applications.
Microelectronics Product Selection (1.8MB)
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Ultra High Purity - Regulators |
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The QR4000
is a high purity, high pressure non-tied diaphragm regulator. It
utilizes a metal-to-metal diaphragm seal which provides enhanced
leak integrity. The NPR4000 regulator is for applications
involving negative delivery pressures with low pressure gas sources.
QR4000/NPR4000 (800kB)
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The QRM
and QRMHF are miniature, high purity, threadless type,
non-tied diaphragm regulators with a footprint designed to reduce
system real estate.
QRM/QRMHF (774kB)
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The 735
Series Regulator offers a two stage, tied diaphragm design to
provide a constant outlet pressure regardless of inlet pressure
fluctuations. The 735 Series tied diaphragm regulator provides shut
off of corrosive or hazardous gases if a leak across the seat
occurs. For subatmospheric pressure control, a negative pressure 735
regulator (NPR735) is available.
735W/NPR735 (646kMB) |
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The 959
Series Regulator is a high pressure, tied diaphragm regulator.
The 959 Series tied diaphragm regulator provides shut off of
corrosive or hazardous gases if a leak across the seat occurs.
Subatmospheric pressure control is available with the NPR959, a
negative pressure 959 regulator.
959W/NPR959
(455kB)
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The HF1200
& HFT1200 Series Single Stage Regulators offer high flow capability with
an inlet pressure up to 1,250 psig. The large convoluted Hastelloy
C22® diaphragm provides stable pressure control over the operational
range of the regulator.
HF1200 Regulator
(261kB)
HFT1200 Regulator
(261kB)
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The HFR900
Series Single Stage Regulator is designed and engineered for use
in those applications using high flow rates requiring a compact
pressure regulator for control. The HFR900 Series regulator
can be used with corrosive and non-corrosive gases and meets most
high flow requirements with less than 500 psig supply pressure.
HFR900W Regulator
(513kB)
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The SQ Series
of regulators provide precise control of the process gas pressure at
or near the tool. The results are stable flow and pressure to the
mass flow controller. The SQ60SA provides precise pressure control
for point-of-use in the sub-atmospheric range.
SQ Regulator (888kB)
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The SQ2Micro
and SQ2Micro130E are miniature, high performance,
point-of-use regulators with a small foot-print. The SQ2Micro
provides excellent repeatability, stability, sensitivity and has
extraordinary response to step function changes.
SQ2MICRO Regulator
(1.1MB)
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The SQHP
Series regulator delivers high purity gas via an internally tied
diaphragm design that is springless and has no threads in the wetted
area. The SQHP allows for inlet pressures up to 3500 psig.
SQHP Regulator (664kB)
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The SQB
Series regulator is designed specifically for bulk specialty gas
systems and incorporates all of the benefits of the SQ Series
regulators. The higher inlet pressure (up to 1250 psig) and up to
300 psig range settings is used with media that condenses easily
when large Delta P occurs.
SQB Regulator (919kB)
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The SPR860
Series regulator is designed with an internal servo that
monitors upstream and downstream pressures. The internal servo
compensates for fluctuations in delivery pressure and flow demand to
maintain a constant pressure delivery.
SPR860 Regulator
(439kB)
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The BFR5K
Series regulator is a compact, high flow, high performance Bulk
Gas regulator designed for semiconductor processing. The BFR5K
provides a stable outlet pressure over a wide variety of conditions
with flow rates as high as 5000 slpm.
BFR5K Regulator (519kB)
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The SQServo
pressure regulator incorporates a pressure-setting knob controlling
a precise pressure sensor, a pneumatic servo-valve, and a high flow,
"dome loaded" large SQ pressure regulator, controlled by the
servo-valve. The pressure sensing servo-valve mechanism smoothly
controls the outlet pressure of the larger pressure regulator to +/-
0.25 psig . The pneumatic servo valve, integrated with the modified
SQ60, amplifies the control signal causing the SQServo to precisely
maintain the set pressure.
SQServo Regulator
(519kB)
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Ultra High Purity - Valves |
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Diaphragm Valves
(3.0MB)
830 Diaphragm Valve (662kB)
845 Diaphragm Valve (1.0MB)
855 Diaphragm Valve (665kB)
16 Series Valve (762kB)
17 Series Valve (935kB)
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Bellows Valves (1.4MB)
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Bulk Gas Valves (1.9MB)
700 Bulk Facility Valve (1.5MB)
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The FS190 Series is
a non-attitude sensitive, excess flow shut-off valve designed to
operate with a wide range of inlet pressures.
FS190 Excess Flow (2.0MB) |
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The VR7
Series is an economical relief valve designed to vent excess
pressure from a regulator should a minor seat leak occur. This valve
is recommended for use with regulators to protect the regulator and
outlet pressure gauge and is not intended for applications where
repeated or frequent venting is required.
VR7 Pressure Relief (1.1MB) |
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The F9 Series Check Valve,
a high purity, all welded check valve, featuring a patented
asymmetric spring design for a consistently quiet operation. The F9
Series Check Valve offers high Cv (up to Cv = 0.90) in a small
footprint to conserve much needed panel space.
F9 Check Valve (2.0MB) |
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Parker Hannifin
Corporation’s Veriflo Division presents the VAC100 Vacuum
Generator which has been designed to be used in conjunction with
purge systems.
Diaphragm Valves
(3.0MB)
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Parker Hannifin
Corporation’s Veriflo Division presents the QFS, Quantum Flow
System. The QFS is a pressure based system that will maintain a
constant pressure to an orifice with a pressure regulator. The
system also incorporates a pressure rate-of-decay system within the
controller, flow verification, which eliminates sensor drift.
Quantum Flow System
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Ultra High Purity - Surface Mount Valves & Regulators |
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Down Mount Products
(369kB)
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The
SMSQ2Micro and SMSQ2Micro130E modular surface mount
regulators are part of the process proven SQ product line. The
SMSQ2Micro provides excellent repeatability, stability, sensitivity
and has extraordinary response to step function changes.
Surface Mount SQ2Micro
(956kB)
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The Surface
Mount Tool Regulator is offered in two flow ranges, the SMTR
and the SMTRHF (High Flow). The SMTR and SMTRHF 1-1/8" tool
regulators are part of the process proven QRM product line which
provides excellent stability and sensitivity for today’s modular
surface mount systems.
Surface Mount SMTR
(622kB)
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Parker Hannifin
Corporation’s Veriflo Division presents the Surface Mount QRM and
the Surface Mount QRM HF Series pressure regulator. The SMQRM
and SMQRMHF are miniature high purity, threadless type, non-tied
diaphragm regulators with a footprint designed to reduce system real
estate.
Surface Mount SQRM
(1.0MB)
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PFA/PTFE Products & Fluoropolymer Tubing |
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Partek manufactures flow control products for use in fluid systems
where corrosion protection is required or where media purity must be
safeguarded. The wetted surfaces of all products are of chemically
inert, corrosion-resistant PFA or PTFE. Durable, leak-free Partek
products are designed for use in semiconductor applications. Partek
products are also used in a variety of other applications including
chemical, food and pharmaceutical processing, and biomedical and
analytical instrumentation.
See
Fluoropolymer Tubing
from Parflex TexLoc |
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PFA/PTFE - Fittings |
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Parflare Fittings
are ideally suited for any ultrapure or corrosive chemical
application. The fitting design yields a leak tight connection with
minimal dead volume and can be used in side loading and vibration
applications. The connection is achieved by a heated flaring process
utilizing an external heat source (HG Heat Gun) and PTFE mandrel (MFT
Manual Flaring Tool), or by using Partek’s optional FG Series
Electronic Flare Gun.
PFA Fittings (1.4MB)
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Pargrip
Fittings are ideally suited
for use in corrosive environments and chemical applications. The
fitting design yields a leak-tight connection and requires no
special tools to assemble. The connection is achieved by merely
inserting the tubing into the fitting assembly and tightening the
nut.
PFA Fittings (1.4MB)
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Parbond
Fittings are ideally suited
for any ultra-pure or corrosive chemical application. The fitting
design yields a leak-tight, permanent connection that is ideal for
high flow, minimal pressure drop applications. The connection is
achieved by fusion welding the two ends together.
PFA Fittings (1.4MB)
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Pipe Fittings
are ideally suited for use in corrosive environments and chemical
applications. The fitting is made from PFA materials, which provides
excellent corrosion resistance.
PFA Fittings (1.4MB)
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PFA/PTFE - Valves |
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The MV-1
Manual PTFE Stop Cock Valve is designed for use in high purity
semiconductor fluid applications, and is also ideally suited for
ultra-pure water and aggressive chemicals.
PFA-PTFE Valves (3.4MB)
MV-1 Manual Stop Cock
(211kB)
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The
MV-6 PTFE 1/4 Turn Ball Valves
are designed for use in high purity semiconductor applications, and
are also ideally suited for use in ultra-pure water and aggressive
chemicals.
PFA-PTFE Valves (3.4MB)
MV-6 Manual Valve (193kB)
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The MV-8 PTFE
Sampling Valve is designed for use in high purity semiconductor
applications, and is also ideally suited for ultra-pure water or
aggressive chemicals.
PFA-PTFE Valves (3.4MB) |
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The MV-10
1/4" PFA 2-Way & 3-Way Diaphragm Valves are designed for use in
high purity semiconductor applications. It is also ideally suited
for ultra-pure water and aggressive chemical or gas applications.
PFA-PTFE Valves (3.4MB)
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The MV-11
1/2" PFA 2-Way & 3-Way Diaphragm Valve is designed for use in
high purity semiconductor applications. It is also ideally suited
for ultra-pure water and aggressive chemical or gas applications.
PFA-PTFE Valves (3.4MB) |
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The MV-12 1"
PFA Diaphragm Valve is designed for use in high purity
semiconductor applications, and is also ideally suited for
ultra-pure water and aggressive chemical or gas applications.
PFA-PTFE Valves (3.4MB)
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The MV-13 PFA
Needle Valve is designed for high purity or aggressive chemical
and gas applications. The design utilizes a molded high purity PFA
body and stem as the only wetted components.
PFA-PTFE Valves (3.4MB) |
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The MV-14 PFA
2-Way Stop Cock Valve is designed for use in high purity
semiconductor applications.
PFA-PTFE Valves (3.4MB)
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The MV-16
3/4" PFA Diaphragm Valve is designed for use in high purity
semiconductor applications, and is also ideally suited for
ultra-pure water and aggressive chemical or gas applications.
PFA-PTFE Valves (3.4MB) |
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The MV-20 1”
Manual PTFE Slurry Valve is designed for use slurry
applications, and is also ideally suited for ultra-pure water and
aggressive chemical or gas applications.
MV-20-4 Valve (289kB)
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The PV-1 PTFE
Miniature Diaphragm Valve is designed for use in high purity
semiconductor applications, and is also ideally suited for
ultra-pure water and aggressive chemical systems.
PFA-PTFE Valves (3.4MB) |
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The PV-10 PFA
1/4” Pneumatic 2-Way & 3-Way Valves are designed for use in high
purity semiconductor applications. It is also ideally suited for
ultra-pure water and aggressive chemical or gas applications.
PFA-PTFE Valves (3.4MB) |
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The PV-11 PFA
1/2” Pneumatic 2-Way, 3-Way, and By-Pass Diaphragm Valves
are designed for use in high purity semiconductor applications. It
is also ideally suited for ultra-pure water and aggressive chemical
or gas applications.
PFA-PTFE Valves (3.4MB) |
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The PV-12 1”
Pneumatic 2-Way Diaphragm Valve is designed for use in high purity
semiconductor applications, and is also ideally suited for
ultra-pure water and aggressive chemical or gas applications.
PFA-PTFE Valves (3.4MB) |
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The PV-16
3/4” Pneumatic PFA 2-Way, 3-Way, and Sampling Valves are
designed for use in high purity semiconductor applications, and is
also ideally suited for ultra-pure water and aggressive chemical or
gas applications.
PFA-PTFE Valves (3.4MB) |
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The PV-20
1/4” - 1” Pneumatic PTFE Distribution Valve is designed for use
in slurry applications, and is also ideally suited for ultra-pure
water and aggressive chemical or gas applications.
PFA-PTFE Valves (3.4MB) |
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The CV-1 PTFE
Check Valve is designed for use in high purity semiconductor
applications, and is also ideally suited for ultra-pure water and
aggressive chemical or gas applications.
PFA-PTFE Valves (3.4MB) |
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The RV Relief
Valve is designed for use in high purity semiconductor
applications, and is also ideally suited for ultra-pure water and
aggressive chemicals.
PFA-PTFE Valves (3.4MB) |
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The SV-2
Solenoid Valve is designed for use in high purity semiconductor
applications, and is also ideally suited for ultra-pure water and
aggressive chemicals. The design utilizes a molded high purity PFA
body with precision machined areas. A one-piece machined modified
PTFE diaphragm is also utilized for excellent flexibility and long
life. The valve is offered in 2 and 3 way configurations, in 3 orifice
sizes, and in 2 standard voltages.
PFA-PTFE Valves (3.4MB) |
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PFA/PTFE - Sensing &
Control |
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The 1/4” PR-1
Pressure Regulators are designed for use in high purity
semiconductor applications, and are also ideally suited for
ultra-pure water and aggressive chemicals.
Sensing & Control
(1.7MB) |
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The 1/2” and 1”
PR-3 PTFE Pressure Regulators are designed for use in high
purity semiconductor applications, and are also ideally suited for
ultra-pure water and aggressive chemicals.
Sensing & Control
(1.7MB) |
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The PR-08
Pressure Regulator features improved performance with no exposed
metals. It is designed for use in high purity fluid handling
applications, including ultra-pure water, aggressive chemicals and
slurry applications.
Sensing & Control
(1.7MB) |
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The DPR-08
Dome Loaded Pressure Regulator features improved performance
with no exposed metals. It is designed for use in high purity f uid
handling applications, including ultra-pure water, aggressive
chemicals and slurry applications.
Sensing & Control
(1.7MB) |
|
 |
The 1/4” PTFE
BR-1 Back Pressure Regulators are designed for use in high
purity semiconductor applications, and are also ideally suited for
ultra-pure water and aggressive chemicals.
Sensing & Control
(1.7MB) |
|
The 1/2” and 1”
PTFE BR-3 Back Pressure Regulators are designed for use in
high purity semiconductor applications, and are also ideally suited
for use in ultra-pure water and aggressive chemicals.
Sensing & Control
(1.7MB) |
|
|
The BR-08
1/2” Back Pressure Regulator features improved performance with
no exposed metals. It is designed for use in high purity f uid
handling applications, including ultra-pure water, aggressive
chemicals and slurry applications.
Sensing & Control
(1.7MB) |
|
The DBR-08
Dome Loaded Back Pressure Regulator features improved
performance with no exposed metals. It is designed for use in high
purity f uid handling applications, including ultra-pure water,
aggressive chemicals and slurry applications.
Sensing & Control
(1.7MB) |
|
 |
The PFA/PTFE
FM-3 Flowmeter is designed for all high purity applications
where precise measurement and control of liquids are required.
Sensing & Control
(1.7MB) |
 |
The PFA/PTFE
FM-4 Flowmeter is designed for all high purity applications
where precise measurement and control of liquids are required.
Sensing & Control
(1.7MB) |
|
 |
The PFA GP
Gauge Protectors are designed for use in high purity
semiconductor applications, and are also ideally suited for use in
ultra-pure water and aggressive chemicals.
Sensing & Control
(1.7MB) |
 |
The PFA GPIL
In-line Gauge Protectors are designed for use in high purity
semiconductor applications, and are also ideally suited for use in
ultra-pure water and aggressive chemicals.
Sensing & Control
(1.7MB) |
|
 |
The PTFE VV
Venturi/Vacuum Generator is designed for corrosive or high
purity gas applications.
Sensing & Control
(1.7MB) |
|
The SMU-1
Inline Static Mixers are designed for use in high purity mixing
applications, including aggressive chemicals, ultra-pure water, and
slurry media.
Sensing & Control
(1.7MB) |
|
 |
The PFA SG-1
DI Water Spray Gun is suitable for use in high purity
semiconductor applications.
Sensing & Control
(1.7MB) |
 |
The PFA SG-1
Nitrogen Gun is suitable for use in high purity semiconductor
applications.
Sensing & Control
(1.7MB) |
|
|
The PTFE
PP Pneumatic Bellows Pump is designed for use in ultra- pure
water and aggressive chemical applications.
Sensing & Control
(1.7MB) |
|
|
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